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CaF2 Crystal 晶体 wafer

25.4mm 50.8mm 76.5mm 100mm

intrinsic

<111><100>

Tetragonal

0.13～11.3

1.39908

N/A 16mm 22.5mm 32.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um

氟化钡（BaF2）晶体 wafer

25.4mm 50.8mm 76.5mm 100mm

intrinsic

<111><100>

Tetragonal

0.13～12.5

1.5122~1.3703

N/A 16mm 22.5mm 32.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um

氟化镁（MaF）晶体 wafer

25.4mm 50.8mm 76.5mm 100mm

intrinsic

<111><100>

Tetragonal

0.1 ～ 7.5

1.39 ~ 1.43

N/A 16mm 22.5mm 32.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um

氟化锂晶体 wafer

25.4mm 50.8mm 76.5mm 100mm

intrinsic

<111><100>

Cubic

1 - 1.4

2.1 ~ 2.35

N/A 16mm 22.5mm 32.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um

氟化钙 (CaF) 氟化镁 (MaF) 氟化钡 (BaF)晶体


Grade	Dimeter	Type/dopant	Orientaion	crystal struction	spectrum penetrate wave length(um)	spectrum refraction rate	Flat	Surface/Roughness	Geometric parameter
CaF2 Crystal 晶体 wafer	25.4mm 50.8mm 76.5mm 100mm	intrinsic	<111><100>	Tetragonal	0.13～11.3	1.39908	N/A 16mm 22.5mm 32.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um
氟化钡（BaF2）晶体 wafer	25.4mm 50.8mm 76.5mm 100mm	intrinsic	<111><100>	Tetragonal	0.13～12.5	1.5122~1.3703	N/A 16mm 22.5mm 32.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um
氟化镁（MaF）晶体 wafer	25.4mm 50.8mm 76.5mm 100mm	intrinsic	<111><100>	Tetragonal	0.1 ～ 7.5	1.39 ~ 1.43	N/A 16mm 22.5mm 32.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um
氟化锂晶体 wafer	25.4mm 50.8mm 76.5mm 100mm	intrinsic	<111><100>	Cubic	1 - 1.4	2.1 ~ 2.35	N/A 16mm 22.5mm 32.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um